NOTICE OF INTENT TO SOLE SOURCE TO COHERENT, INC The National Institute of Standards and Technology (NIST) intends to negotiate on a sole source basis with Coherent, Inc., Santa Clara, CA, under the authority of FAR 13.106-1(b) Soliciting From a Single Source, a Pulsed Laser System with the following specifications: Wavelength: 157 nm, F2 premix (with option to convert to 193 nm, ArF premix) Pulse Width: <10 ns Pulse Repetition Rate: 500 Hz Pulse Energy: 1 mJ or greater Integrated Pulse Energy Stabilization, Readout - energy stability in the range of 1-2% Computer Interface and Software Single-Phase Power requirement Integrated Air Cooling Integrated vacuum pump and halogen filter Based on market research, NIST has not identified any other sources that can provide the required product. If NIST identifies no other capable sources by August 13, 2012, NIST will issue a firm-fixed price purchase order on or about August 14, 2012 to Coherent, Inc.. Interested parties may identify their interest and capability to respond to the requirement, in writing, no later than the response date. Written responses to this synopsis shall contain sufficient documentation to establish a bona fide capability to fulfill the requirement. The North American Industry Classification System (NAICS) code for this acquisition is 334516, and the size standard is 500 employees. A determination by the Government whether to compete the proposed requirement based upon responses to this notice is solely within the discretion of the Government. Information received will normally be considered solely for the purpose of determining whether to conduct a competitive procurement in the future. This notice of intent is not a Request for Quotation (RFQ). No solicitation package will be issued. Inquiries will only be accepted via e-mail to [email protected]. No telephone requests will be honored. ***SEE ATTACHED JOFOC FOR ADDITIONAL INFORMATION***

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