RECOVERY - The National Institute of Standards & Technology (NIST) seeks information on commercial vendors that are capable of providing a furnace system for high temperature processing of silicon wafers. The furnace system will be installed in a clean room at NIST in Boulder, CO. Both low pressure chemical vapor deposition (LPCVD) and atmospheric processes will be required. The furnaces will be used for fabricating microelectromechanical (MEMS) devices for a wide variety of sensor, imaging, ion confinement and biomagnetic research projects at NIST. After results of this market research are obtained and analyzed and specifications are developed for a furnace system that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside.

This contemplated procurement is anticipated to use American Reinvestment and Recovery Act Funds of 2009 if it is determined that responsible sources can satisfy the requirements. THIS IS NOT A REQUEST FOR A QUOTATION, INFORMATION RECEIVED WILL BE USED FOR MARKET RESEARCH PURPOSES ONLY.

NIST has a need for a furnace system for high temperature processing of silicon wafers that would meet the following requirements:

2 banks, 8 tubes

Capable of processing 3", 4" and 6" wafers

Tube/process list:

LPCVD Low Stress Silicon Nitride

LPCVD Stoichiometric Silicon Nitride

LPCVD Poly silicon

LPCVD Low Temp Oxide

Wet/dry oxidation

Nitrogen/Forming Gas Anneal

Solid source boron doping of silicon wafers

Solid source phosphorous doping of silicon wafers

Dry pumps with blowers on all LPCVD tubes

Option - spare pump and blower

2 sets of quartz-ware for 3,4, 6" wafers for all tubes

Spare parts kit

Proven recipes for the above processes

Dual cylinder, automatic purge panel gas cabinets for DCS, NH3, Silane, hydrogen

Pump exhaust CDO/scrubber abatement system for all pump exhausts

NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company's size classification in any response to this notice.

Companies that manufacture silicon processing furnace systems are requested to email a detailed report describing their abilities to [email protected] cc: [email protected] no later than the response date for this sources sought notice. The report should include achievable specifications and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that manufactures the system components for which specifications are provided. 2. Name of company(ies) that are authorized to sell the system components, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such systems. 4. Indication of whether each instrument for which specifications are sent to [email protected] cc: [email protected] are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research.
Contracting Office Address:
100 Bureau Drive, Building 301, Room B129, Mail Stop 1640
Gaithersburg, Maryland 20899-1640
Place of Performance:
NIST
BOULDER COLORADO
United States
Primary Point of Contact:
JoAnn Moore
Contractor, Senior Acquisition Specialist
Phone: (301) 975-8335
[email protected]

Secondary Point of Contact:
Todd D. Hill
Contracting Officer
[email protected]
Phone: 301-975-3978