G
The Nanofabrication Operations Group of the NIST PML has the mission of advancing measurement science by providing researchers with rapid access to state-of-the-art, commercial nanoscale measurement and fabrication tools and methods, along with associated technical expertise, at economical hourly rates. It is well equipped to process and characterize a wide range of nanoscale materials, structures, and devices.
NIST seeks to acquire the proprietary dual-frequency plasma enhanced chemical vapor deposition system Oxford 100 platform that is equipped with the advanced load-lock and X20 PLC. NIST currently owns four Oxford 100 systems etching and deposition of materials. This instrument is an essential thin film deposition tool for the users of the NanoFab, and the objective of this procurement is to enable the same users to deposit high quality PECVD films on small pieces and full-sized wafers. Due to interoperability requirements with the presently owned and in-service Oxford 100 systems (user training, software, and hardware), we have a brand name requirement for an Oxford 100 system dual-frequency parallel plate PECVD system.
A requirement of this acquisition is that the current user base of the Oxford 100 tools be able to use the new Oxford 100 PECVD without any re-training for the mechanics of the tool or the software used to control the tool and analyze data. Because the operation of the Oxford 100 tools are substantially identical, this requirement can only be met by purchasing an Oxford 100 system.
Additionally, we require interoperability between the various Oxford systems for process data-logging and maintenance. A uniform data-logging format allows measurements of hardware parameters to be correlated between the various existing Oxford 100 platform systems. Because the Oxford software and database is proprietary, this can only be accomplished by purchasing the Oxford 100 platform.
The North American Industry Classification System (NAICS) code for this acquisition is 334516 and the size standard is 1,000 employees.
No solicitation package will be issued. This notice of intent is not a request for competitive quotations; however, all responsible sources interested may identify their interest and capability to respond to this requirement. The Government will consider responses received by 12:00 p.m. Eastern on June 26, 2019. Inquiries will only be accepted via email to [email protected] . No telephone requests will be honored.
A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government. Information received will normally be considered solely for the purpose of determining whether to conduct a competitive procurement in the future.