The Army Contracting Command-Redstone is soliciting a quote. In order for a quote to be accepted, the vendor must provide historical pricing data such as copies of previous invoices or purchase orders to support fair and reasonable pricing. Combined Synopsis/Solicitation Number W31P4Q-18-Q-0048 is to be a Sole-Source procurement to Trion Technology Inc. of Clearwater Florida, in accordance with FAR 13.501 for soliciting from a single source in that the circumstances of the contract action make only one source reasonably available. The corresponding NAICS code for this procurement is 333242. The US Army Contracting Command-Redstone is soliciting a quote from Trion Technology Inc., for the purchase of the following item:
One (1) each Trion Technology Phantom III^TM Reactive Ion Etch (RIE) System
•Included as standard:
Phantom III ^TM RIE reactor with 200mm bottom electrode
Radially designed high conductance plenum
System controller (includes computer and touch screen interface)
Four mass flow controllers (O2, SF6, CF4, CHF3)
Automatic pressure control
Automatic tuning
600 Watt, 13.56 MHz RF generator
Emergency Off and AC distribution
Installation and training for maintenance and operator
12-month service warranty (includes parts and labor)
•With the following options added:
Inductively controlled plasma (ICP) source: 600 Watts, 13.56 MHz RF generator
23.3 cubic feet per minute (cfm) rotary vane pump with oil filtration, demister, and
Fomblin oil
Recirculating temperature controller
Three each extra mass flow controller (N2, He, Ar)
Vacuum load-lock upgrade, to include:
Load-lock, gate valve, robot, and mechanical roughing pump
Electrostatic chuck with helium backside cooling
Mechanical clamp for two (2) wafer sizes (3" to 8") with helium backside cooling
Heater/chiller (-20C to 70C)
60 cfm non-corrosive dry pump
Osaka Mag-Lev Turbo pump (390 liters/second)

The incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-96. Any award resulting from this RFQ will be issued on Standard Form 1449 and will contain all clauses required by law, the Federal Acquisition Regulation (FAR), and the Defense Federal Acquisition Regulation Supplement (DFARS) as appropriate for the dollar value of the award. Provision 52.209-2, Prohibition on Contracting with Inverted Domestic Corporations - Representation; Provision 52.212-1, Instructions to Offerors - Commercial; Provision 52.212-2, Evaluation - Commercial items; Provision 52.212-3, Offeror Representations and Certifications - Commercial Items; Clause 52.212-4, Contract Terms and Conditions - Commercial Items; Clause 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items; Clause 52.222-50 Combatting Trafficking in Persons Clause; 52.223-18 Contractor Policy to Ban Text Messaging While Driving; Clause 52.232-39, Unenforceability of Unauthorized Obligations; Clause 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items; and Clause 252.232-7003, Electronic Submission of Payment Requests and Receiving Reports are applicable to this acquisition. Other clauses may be included in the award if applicable. All responsible sources may submit a capability statement and quotation which shall be considered by the agency. In the event more than one quote is received, the following factors shall be used to evaluate offers: technical capability of the items offered to meet the Government requirement, price, and delivery. All items shall include shipping costs FOB Destination to Redstone Arsenal, AL. Payment will be made via Wide Area Workflow. Responses are due no later than 4:00 PM (local time), 8 March, 2018 in the contracting office, Building 5400, Room B-142, Redstone Arsenal, Alabama, 35898. Oral communications are not acceptable in response to this notice. Electronic quotes are preferred, but fax quotes will be accepted. Responses may be submitted to: [email protected] or via facsimile at 256-876-7737, marked to the attention of Jeff Hestley.

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