Stylus Profilometer Model P6 Surface Profiler KLA- Tencor or equivalent.

[If Equiv., provide a comparison Matrix table]

Must have following Specifications if not equivalent to above:

1) 1 mm Max scan hgt.

2) 1 nm or better step height repeatability

3) Stylus force range at least 1 to 15 mg

4) 150 mm or greater max scan length

5) Motorized X-Y table w/ 150 mm x 150 mm translation with removable wafer alignment pins

6) Sample height accomodation at least 60 mm

7) Sample vacuum chuck capability

8) Stylus change ability less than 5 minutes.

9) 3D Scan capability for 3D sample mapping.

10) Film stress measurement.

11) 1 stylus tip supplied with system plus one extra spare.

12) Zoom video and camera frame grabbing capability.

13) 1 step height standard.

14) i year complete warranty.

15) Profiler delivery on site at BNL by 11/12/2008 latest.

16) At least 1 day set up and customer training.

17) No time limit requirements for profiler setup and training.

18) Vendor suggested vibration isolation platform or table.